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Proceedings Paper

A transient charging model to predict actuation-voltage shift in RF MEMS capacitive switches
Author(s): Xiaobin Yuan; James C. M. Hwang; David Forehand; Charles L. Goldsmith
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Paper Abstract

For state-of-the-art RF MEMS capacitive switches, a dielectric-charging model was constructed to predict the amount of charge injected into the dielectric and the corresponding shift in actuation voltage. The model was extracted from measured charging and discharging transient currents on the switch dielectric under different control voltages. The model was verified against the actuation-voltage shift under different control waveforms. Duty factor and peak voltage of the control waveform were found to be critical acceleration factors for the charging effects while actuation frequency is not an acceleration factor. The model is capable of predicting the actuation-voltage shift under complex control waveforms such as the dual-pulse waveforms. For RF MEMS capacitive switches that fail mainly due to dielectric charging, the model can be used to design control waveforms that can either prolong lifetime or accelerate failure.

Paper Details

Date Published: 5 January 2006
PDF: 8 pages
Proc. SPIE 6111, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V, 61110G (5 January 2006); doi: 10.1117/12.657691
Show Author Affiliations
Xiaobin Yuan, Lehigh Univ. (United States)
James C. M. Hwang, Lehigh Univ. (United States)
David Forehand, MEMtronics Corp. (United States)
Charles L. Goldsmith, MEMtronics Corp. (United States)

Published in SPIE Proceedings Vol. 6111:
Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS V
Danelle M. Tanner; Rajeshuni Ramesham, Editor(s)

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