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Proceedings Paper

The cross-beam pulsed laser deposition
Author(s): Andre Gorbunoff
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Paper Abstract

Due to hyperthermal particle energies, extremely high pulse deposition, and quenching rates the pulsed laser deposition (PLD) lies apart from all the other known deposition methods. The paper reviews the peculiarities of the cross-beam PLD (CBPLD), one of the most effective variant of high vacuum PLD with colliding ablation plumes. In addition to the reliable reduction of any form of macroparticle contamination it allows the fabrication of films with unexpected crystalline structure and unique physical properties, making the CBPLD a unique hyperthermal energy deposition technique.

Paper Details

Date Published: 1 March 2006
PDF: 10 pages
Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61060U (1 March 2006); doi: 10.1117/12.657108
Show Author Affiliations
Andre Gorbunoff, Univ. of Applied Sciences Dresden (Germany)

Published in SPIE Proceedings Vol. 6106:
Photon Processing in Microelectronics and Photonics V
David B. Geohegan; Tatsuo Okada; Craig B. Arnold; Frank Träger; Jan J. Dubowski; Michel Meunier; Andrew S. Holmes, Editor(s)

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