SPM (Scanning Probe Microscope) provides "three-dimensional images" with nanometer level resolution, and some of them can be used as metrology tools. However, SPM's images are commonly distorted by non-ideal properties of SPM's piezoelectric scanner, which reduces metrological accuracy and data repeatability. In order to eliminate this limit, an "open-loop sampling" method is presented. In this method, the positional values of sampling points in all three directions on the surface of the sample are measured by the position sensor and recorded in SPM's image file, which is used to replace the image file from a conventional SPM. Because the positions in X and Y directions are measured at the same time of sampling height information in Z direction, the image distortion caused by scanner locating error can be reduced by proper image processing algorithm.

Date Published: 24 March 2006
PDF: 9 pages
Proc. SPIE 6152, Metrology, Inspection, and Process Control for Microlithography XX, 615241 (24 March 2006); doi: 10.1117/12.655781

Published in SPIE Proceedings Vol. 6152:
Metrology, Inspection, and Process Control for Microlithography XX
Chas N. Archie, Editor(s)