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Proceedings Paper

Statistical shape analysis applied to microlithography
Author(s): Alessandra Micheletti; Ermes Severgnini; Filippo Terragni; Mauro Vasconi
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Paper Abstract

In this paper we introduce recent mathematical tools for shape description called size functions. Some features of these descriptors such as robustness with respect to noise are pointed out. A first attempt to join the theory of size functions with randomness and to develop the related statistical analysis is then presented. The resulting procedure is applied to some specific problems which arise in microlithography of electronic devices.

Paper Details

Date Published: 15 March 2006
PDF: 8 pages
Proc. SPIE 6155, Data Analysis and Modeling for Process Control III, 61550J (15 March 2006); doi: 10.1117/12.653037
Show Author Affiliations
Alessandra Micheletti, Univ. degli Studi di Milano (Italy)
Ermes Severgnini, STMicroelectronics Srl (Italy)
Filippo Terragni, Univ. degli Studi di Milano (Italy)
Mauro Vasconi, STMicroelectronics Srl (Italy)

Published in SPIE Proceedings Vol. 6155:
Data Analysis and Modeling for Process Control III
Iraj Emami; Kenneth W. Tobin Jr., Editor(s)

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