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Proceedings Paper

Replication of a sinusoidal grid surface by hot embossing and UV-casting
Author(s): Naoya Tsurumi; Wei Gao; Akihide Kimura; Satoshi Kiyono
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Paper Abstract

This paper describes the replication of a precision sinusoidal grid surface, which is used as the measurement reference of a surface encoder for measurement of planar motions. The profile of the grid surface is a superposition of sinusoidal waves in the X-direction and the Y-direction with spatial wavelengths of a hundred micrometers and amplitudes of a hundred nanometers. The master surface is fabricated on a diamond turning machine equipped with a fast tool servo. Two kinds of replication methods, the hot embossing and UV casting are employed for replicating the grid surface on polymer materials. The replication on a glass plate is also carried out by UV-casting. The replication systems and some experimental results are presented.

Paper Details

Date Published: 6 December 2005
PDF: 8 pages
Proc. SPIE 6052, Optomechatronic Systems Control, 60520P (6 December 2005); doi: 10.1117/12.648300
Show Author Affiliations
Naoya Tsurumi, Tohoku Univ. (Japan)
Wei Gao, Tohoku Univ. (Japan)
Akihide Kimura, Tohoku Univ. (Japan)
Satoshi Kiyono, Tohoku Univ. (Japan)

Published in SPIE Proceedings Vol. 6052:
Optomechatronic Systems Control
Farrokh Janabi-Sharifi, Editor(s)

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