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Proceedings Paper

Fabrication of SIL array of glass by surface-tension mold technique
Author(s): Tetsuo Kishi; Shuichi Shibata; Tetsuji Yano
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Paper Abstract

A preparation of microlens array of the super-spherical glasses by a combination of the photolithography and the Surface-tension Mold (StM) techniques is shown. A super-spherical lens has been gathering much attention because of its function as a Solid Immersion Lens (SIL) with the super-resolution, which circumvents the optical diffraction limit. StM technique enables the preparation of a micrometer-sized SIL (μ-SIL) with the desirable shape, and the obtained SILs realize the optical function. In order to develop the optical micro-devices composed of SILs, μ-SIL array module, the micro-fabrication technique of photolithography is combined with StM technique. Na2O-CaO-SiO2 glass film is attached to glassy-carbon, and etched into glass tiles after the formation of masks by the photolithography. They are heated up to 800oC to self-organize into the super-spherical form of the glass droplets. The obtained lens array is found to be composed of the μ-SILs with the uniform radius and thickness.

Paper Details

Date Published: 28 February 2006
PDF: 8 pages
Proc. SPIE 6126, Photonics Packaging and Integration VI, 61260P (28 February 2006); doi: 10.1117/12.647317
Show Author Affiliations
Tetsuo Kishi, Tokyo Institute of Technology (Japan)
Shuichi Shibata, Tokyo Institute of Technology (Japan)
Tetsuji Yano, Tokyo Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 6126:
Photonics Packaging and Integration VI
Allen M. Earman; Ray T. Chen, Editor(s)

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