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Proceedings Paper

Fabrication of periodic arrays of top-gathering titania-organic hybrid pillars derived from multi-beam laser interference
Author(s): Hiroyo Segawa; Hiroaki Misawa; Tetsuji Yano; Shuichi Shibata
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Paper Abstract

Multi-beam laser interference (MLI) lithography is known to be one of the fabrication techniques of photonic crystals. In MLI lithography, laser beams are interfered on a scale of the wavelength of light and are irradiated to photosensitive films. We have paid attention to photosensitive TiO2-organic hybrid film, which has high refractive index. TiO2-organic hybrid periodic pillar patterns were fabricated by MLI lithography. The TiO2 hybrid film, which was prepared from Ti-alkoxide and β-diketone by the sol-gel method, was exposed to the interference pattern of femtosecond pulses at 800 nm wavelength. After laser irradiation, the unirradated portion was removed by the development and rinse. Two-dimensional periodic standing alone pillars and 2×2 and 3×3 top-gathering pillars, which were gathered at the top by means of self-organization were formed by changing conditions such as laser irradiation time and film thickness. The pillar patterns depended upon the rinse liquid, the diameter, and the height of pillars. The top-gathering pillars are applicable for diffractive optics.

Paper Details

Date Published: 1 March 2006
PDF: 9 pages
Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61060N (1 March 2006); doi: 10.1117/12.647213
Show Author Affiliations
Hiroyo Segawa, Tokyo Institute of Technology (Japan)
Japan Science and Technology Corp. (Japan)
Hiroaki Misawa, CREST-JST, Hokkaido Univ. (Japan)
Tetsuji Yano, Tokyo Institute of Technology (Japan)
Shuichi Shibata, Tokyo Institute of Technology (Japan)

Published in SPIE Proceedings Vol. 6106:
Photon Processing in Microelectronics and Photonics V
David B. Geohegan; Tatsuo Okada; Craig B. Arnold; Frank Träger; Jan J. Dubowski; Michel Meunier; Andrew S. Holmes, Editor(s)

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