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Proceedings Paper

Optically driven microtools fabricated by UV lithography and RIE
Author(s): Peter John Rodrigo; Lauge Gammelgaard; Peter Bøggild; Ivan R. Perch-Nielsen; Jesper Glückstad
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Paper Abstract

We demonstrate the use of multiple optical traps for driving various microfabricated silica structures in liquid host medium. Multiple counterpropagating-beam traps are formed using a generalized phase contrast (GPC) -based optical trapping system. A combination of UV-lithography and reactive-ion etching (RIE) is employed to fabricate the microtools whose design includes having multiple appendages with rounded endings by which optical traps hold and actuate them. Experiments show the collective and user-coordinated utility of multiple beams for driving microstructured objects whose future integration may lead to optically controlled micromachineries.

Paper Details

Date Published: 9 February 2006
PDF: 5 pages
Proc. SPIE 6131, Nanomanipulation with Light II, 61310C (9 February 2006); doi: 10.1117/12.646469
Show Author Affiliations
Peter John Rodrigo, Risø National Lab. (Denmark)
Lauge Gammelgaard, Technical Univ. of Denmark (Denmark)
Peter Bøggild, Technical Univ. of Denmark (Denmark)
Ivan R. Perch-Nielsen, Risø National Lab. (Denmark)
Jesper Glückstad, Risø National Lab. (Denmark)

Published in SPIE Proceedings Vol. 6131:
Nanomanipulation with Light II
David L. Andrews, Editor(s)

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