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Proceedings Paper

Active control of the ablation plume for laser ablation atomic fluorescence spectroscopy
Author(s): Dasisuke Nakamura; Takayuki Takao; Yuji Oki; Mitsuo Maeda
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Paper Abstract

We have developed an extreme sensitive trace element detection technique that has been labeled Laser ablation atomic fluorescence (LAAF) spectroscopy, and applied to a nanometer-scale solid surface analysis. The absolute weight of the detection limit of 870 ag (10-18g) and high depth resolution of 3.6 nm had been demonstrated in trace sodium detection of polymethylmethacrylate. As a laser ablation was used in the LAAF spectroscopy, the behavior of the ablation plume is a very important factor for high sensitivity. So, we tried to control the plume by a buffer gas and an assist mask for more sensitive analysis. The diffusion velocity of the ablated particles was modified in collision with the gas molecules. Furthermore, it was found that the form of the plume was changed by the mask. Thus, improvement of the detection sensitivity of the LAAF is expected using this approach.

Paper Details

Date Published: 1 March 2006
PDF: 10 pages
Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61061A (1 March 2006); doi: 10.1117/12.645323
Show Author Affiliations
Dasisuke Nakamura, Kyushu Univ. (Japan)
Takayuki Takao, Kyushu Univ. (Japan)
Yuji Oki, Kyushu Univ. (Japan)
Mitsuo Maeda, Kurume National College of Technology (Japan)

Published in SPIE Proceedings Vol. 6106:
Photon Processing in Microelectronics and Photonics V
David B. Geohegan; Tatsuo Okada; Craig B. Arnold; Frank Träger; Jan J. Dubowski; Michel Meunier; Andrew S. Holmes, Editor(s)

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