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Proceedings Paper

Thick hybrid silica-zirconia sol-gel film for single-step fabrication of channel waveguide
Author(s): Miao He; Jing Bu; Xiaocong Yuan
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Paper Abstract

An improved synthesis of inorganic-organic hybrid silica-zirconia sol-gel material has been developed, and it has controllable refractive index and can form ten-micron-thick film in a single spin coating process. The novel synthesis was realized by uniform hydrolysis and subsequent copolymerization of [3-(methacryloxy) propyl] trimethoxysilane and zirconium propoxide. The optical properties of the prepared sol-gel material was studied and characterized by a series of experiments. Compared with the sol-gel films reported before, the sol-gel film had good internal homogeneity and surface uniformity due to single layer structure. We employed the hybrid silica-zirconia sol-gel film in the singlestep fabrication of a dielectric channel waveguide on a quartz substrate. In the fabrication process, the sol-gel film was exposed to UV through a binary mask, and the exposed zone within the film formed a channel waveguide core because of its refractive index increase. The channel waveguide core was then covered again with a layer of the same kind of sol-gel film, and the unexposed zone within the sol-gel film, along with the new cover layer, formed the cladding of final dielectric channel waveguide. The novel sol synthesis enabled a precise control of the geometrical and optical parameters of the channel waveguide. In the 1.55 μm telecommunication window, the fundamental modes TE00 and TM00 in the channel waveguide had acceptable transmission losses of 1.20 ± 0.06 dB / cm and 1.79 ± 0.06 dB / cm, respectively.

Paper Details

Date Published: 24 February 2006
PDF: 9 pages
Proc. SPIE 6123, Integrated Optics: Devices, Materials, and Technologies X, 61230H (24 February 2006); doi: 10.1117/12.643640
Show Author Affiliations
Miao He, Nanyang Technological Univ. (Singapore)
Jing Bu, Nanyang Technological Univ. (Singapore)
Xiaocong Yuan, Nanyang Technological Univ. (Singapore)
Shenzhen Univ. (China)

Published in SPIE Proceedings Vol. 6123:
Integrated Optics: Devices, Materials, and Technologies X
Yakov Sidorin; Christoph A. Waechter, Editor(s)

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