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Proceedings Paper

Optical design of a double pass surface encoder
Author(s): Yoji Watanabe; Wei Gao; Hiroki Shimizu; Satoshi Kiyono
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Paper Abstract

This paper describes the optical design of a new type surface encoder, which consists of a 2D angle grid and a 2D slope sensor for 2D position detection. The sensitivity of the new type surface encoder is two times higher than that of a conventional surface encoder through employing a double pass. A wave optical model of the surface encoder is established for the optical design. Simulations based on the wave optical model are carried out to analyze the behavior of the diffraction pattern on the photo-detector of the slope sensor. Basic experiments are also carried out to confirm the feasibility of the double pass surface encoder.

Paper Details

Date Published: 6 December 2005
PDF: 8 pages
Proc. SPIE 6052, Optomechatronic Systems Control, 60520R (6 December 2005); doi: 10.1117/12.642027
Show Author Affiliations
Yoji Watanabe, Tohoku Univ. (Japan)
Wei Gao, Tohoku Univ. (Japan)
Hiroki Shimizu, Tohoku Univ. (Japan)
Satoshi Kiyono, Tohoku Univ. (Japan)

Published in SPIE Proceedings Vol. 6052:
Optomechatronic Systems Control
Farrokh Janabi-Sharifi, Editor(s)

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