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Proceedings Paper

Development of microscopic surface profile estimation algorithm through reflected laser beam analysis
Author(s): Jung-Hwan Ahn; Young-Ho Seo; Hwa-Young Kim
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Paper Abstract

In order to measure a surface roughness profile without contacting with surface, optical equipments are usually used. However, the light interference based measurements require a translation mechanism of nano-meter order to make phase differences or multiple focusing. That is an obstacle for the optical measurement to be applied to in-process measurement for factory automation. On the other hand the light reflectance based method do not need any moving mechanism. However, it has been known that it can measure only an average surface roughness but measure surface height profile. In this research, a new algorism is proposed to estimate a microscope surface profile from a given reflected light intensity image. The principle of the algorithm is based on statistical parameterizations of decomposed light. The proposed algorithm was proved to well estimate surface height profiles through some equipments.

Paper Details

Date Published: 6 December 2005
PDF: 10 pages
Proc. SPIE 6049, Optomechatronic Sensors and Instrumentation, 604905 (6 December 2005); doi: 10.1117/12.642018
Show Author Affiliations
Jung-Hwan Ahn, Pusan National Univ. (South Korea)
Young-Ho Seo, Pusan National Univ. (South Korea)
Hwa-Young Kim, Pusan National Univ. (South Korea)

Published in SPIE Proceedings Vol. 6049:
Optomechatronic Sensors and Instrumentation
Yasuhiro Takaya, Editor(s)

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