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Proceedings Paper

Design and fabrication of a MEMS-based piezoresistive pressure sensor for use in pharyngeal manometry
Author(s): Richard L. Petty; Alex J. Hariz
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Paper Abstract

We present the design and fabrication methods for a piezoresistive pressure sensor intended for use in biomedical applications and in particular, pharyngeal manometry. Design requirements are investigated for the sensors size, pressure range and frequency response. The piezoresistive effect is investigated to determine the crystallographic orientation of the substrate and the position of the piezoresistive elements on the surface of the chip. A design calculation method is derived, and a design approach is proposed that satisfy the requirements of the application. Finally a brief description is given of the fabrication processing steps that could be utilised to realise this design.

Paper Details

Date Published: 5 January 2006
PDF: 11 pages
Proc. SPIE 6035, Microelectronics: Design, Technology, and Packaging II, 603522 (5 January 2006); doi: 10.1117/12.641109
Show Author Affiliations
Richard L. Petty, Univ. of South Australia (Australia)
Alex J. Hariz, Univ. of South Australia (Australia)

Published in SPIE Proceedings Vol. 6035:
Microelectronics: Design, Technology, and Packaging II
Alex J. Hariz, Editor(s)

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