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Proceedings Paper

Structural and optical characterization of sprayed ZnS thin films
Author(s): Tatjana Dedova; Arvo Mere; Malle Krunks; Olga Kijatkina; Ilona Oja; Olga Volobujeva
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Paper Abstract

The cost-effective spray pyrolysis technique was applied to prepare ZnS thin films for large-scale applications. Aqueous solutions containing ZnCl2 and SC(NH2)2 were deposited onto glass and n-type Si(100) substrates at 430-600°C. The structure and phase composition were studied by XRD and FTIR, the surface morphology by SEM. The optical properties were determined from the transmittance and reflectance measurements in the UV-visible and near-IR regions. The phase composition, crystallinity, and surface morphology of the films could be controlled by the Zn:S molar ratio in the stock solution and the deposition temperature. Highly (001) oriented ZnS films with wurtzite structure were grown at temperatures above 500°C using the Zn:S molar ratio 1:2 in the solution. The sprayed films had high optical transmittance in a wide spectral range and the refractive index of up to 1.9 at 632.8 nm. It was also found that the sprayed ZnS films are capable of being used as antireflection coatings in Si-based devices.

Paper Details

Date Published: 12 June 2006
PDF: 7 pages
Proc. SPIE 5946, Optical Materials and Applications, 594605 (12 June 2006); doi: 10.1117/12.639065
Show Author Affiliations
Tatjana Dedova, Tallinn Univ. of Technology (Estonia)
Arvo Mere, Tallinn Univ. of Technology (Estonia)
Malle Krunks, Tallinn Univ. of Technology (Estonia)
Olga Kijatkina, Tallinn Univ. of Technology (Estonia)
Ilona Oja, Tallinn Univ. of Technology (Estonia)
Olga Volobujeva, Tallinn Univ. of Technology (Estonia)

Published in SPIE Proceedings Vol. 5946:
Optical Materials and Applications
Arnold Rosental, Editor(s)

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