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Proceedings Paper

Knowledge-based process simulation and design system for MEMS
Author(s): J. Popp; T. Schmidt; A. Wagener; K. Hahn; R. Brück; A. Hössinger
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Paper Abstract

A design model representing the relations between application specific fabrication processes and the structural design flow will be presented. Subsequently a MEMS process design, simulation and tracking system, called PROMENADE, is introduced. It allows the specification of processes for specific applications, the simulation and the tracking of the development procedures.

Paper Details

Date Published: 5 January 2006
PDF: 8 pages
Proc. SPIE 6035, Microelectronics: Design, Technology, and Packaging II, 603512 (5 January 2006); doi: 10.1117/12.638483
Show Author Affiliations
J. Popp, Univ. of Siegen (Germany)
T. Schmidt, Univ. of Siegen (Germany)
A. Wagener, Univ. of Siegen (Germany)
K. Hahn, Univ. of Siegen (Germany)
R. Brück, Univ. of Siegen (Germany)
A. Hössinger, Silvaco Technology Ctr. (United Kingdom)

Published in SPIE Proceedings Vol. 6035:
Microelectronics: Design, Technology, and Packaging II
Alex J. Hariz, Editor(s)

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