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Proceedings Paper

Dynamic analysis of a compliant bistable micromechanism with one DOF system
Author(s): Jinni Tsay; Cheng-Kuo Sung
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Paper Abstract

This paper presents an investigation on the dynamic characteristics of a compliant bistable micromechanism. The analyzed bistable micromechanism has two stationary positions at the two extremes of the motion range, where the strain energies are local minimum. A bistable mechanism is a nonlinear system with a special stiffness. In this study, the compliant bistable micromechanism adopted was a well-known configuration. The central mass of the micromechanism was treated as a carriage to carry switching components, such as a mirror or an electrical contact. The dynamic characteristics of the bistable micromechanism would be significant in the application of switching devices. In order to verify the correctness of theoretical prediction on the dynamic characteristics, the designed micromechanisms were fabricated by MEMSCAP's PolyMUMPs(R). In addition, a test rig incorporating the required instruments was then constructed for measuring the performance of the bistable micromechanism. From the experimental study, it revealed that good agreement between analytical and experimental results were obtained.

Paper Details

Date Published: 3 January 2006
PDF: 10 pages
Proc. SPIE 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV, 60371N (3 January 2006); doi: 10.1117/12.638351
Show Author Affiliations
Jinni Tsay, National Tsing Hua Univ. (Taiwan)
Cheng-Kuo Sung, National Tsing Hua Univ. (Taiwan)

Published in SPIE Proceedings Vol. 6037:
Device and Process Technologies for Microelectronics, MEMS, and Photonics IV
Jung-Chih Chiao; Andrew S. Dzurak; Chennupati Jagadish; David V. Thiel, Editor(s)

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