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Proceedings Paper • Open Access

A unique new microtechnology facility for Australia
Author(s): H. Barry Harrison

Paper Abstract

The Queensland Microtechnology Facility is an initiative of the Queensland Government in conjunction with Griffith University. The Queensland Government through its Smart State Research Facilities Funds (SSRFF) is providing funds for equipment to equip a purpose built building provided by the University. The focus of the Facility is on the application of Silicon Carbide on Silicon semiconductor systems. This is an important feature that enables access to the mature silicon technology at the same time providing access the less mature but very promising SiC technology and its properties. These properties include broad bandgap, thus high voltage and high temperature operations, excellent mobilities, very small leakage currents and high thermal conductivity. The QMF is unique in that it will encourage state of the art research with a commercial bias. It will be equipped with custom built equipment to meet the goals of the Facility. Already there are projects directed toward the exploitation of Silicon Carbide on Silicon Technology being undertaken. This paper provides some background to the planning process associated with the realisation of the QMF.

Paper Details

Date Published: 29 December 2005
PDF: 9 pages
Proc. SPIE 6035, Microelectronics: Design, Technology, and Packaging II, 603501 (29 December 2005); doi: 10.1117/12.637891
Show Author Affiliations
H. Barry Harrison, Griffith Univ. (Australia)

Published in SPIE Proceedings Vol. 6035:
Microelectronics: Design, Technology, and Packaging II
Alex J. Hariz, Editor(s)

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