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Proceedings Paper

High-resolution FPAs on MBE-grown HgCdTe/CdTe/Ge
Author(s): G. Badano; P. Ballet; J. P. Zanatta; A. Millon; C. Largeron; J. Baylet; J. Rothman; O. Gravrand; P. Castelein; J. P. Chamonal; G. Destefanis; S. Mibord; P. Costa
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Paper Abstract

We report on the progress achieved in the molecular beam epitaxy of 3" and 4" HgCdTe on CdTe(211)B/Ge composite substrates, and the subsequent fabrication of high performance focal plane arrays. We first describe the growth of the heterostructures, and their characterization. Then we examine the fabrication of a 1280x1024 small-pitch focal plane array, which shows operability in excess of 99% for both the responsivity and the noise-equivalent thermal difference.

Paper Details

Date Published: 14 October 2005
PDF: 9 pages
Proc. SPIE 5964, Detectors and Associated Signal Processing II, 596406 (14 October 2005); doi: 10.1117/12.637514
Show Author Affiliations
G. Badano, CEA-DRT-LETI/DOPT/LIR (France)
P. Ballet, CEA-DRT-LETI/DOPT/LIR (France)
J. P. Zanatta, CEA-DRT-LETI/DOPT/LIR (France)
A. Millon, CEA-DRT-LETI/DOPT/LIR (France)
C. Largeron, CEA-DRT-LETI/DOPT/LIR (France)
J. Baylet, CEA-DRT-LETI/DOPT/LIR (France)
J. Rothman, CEA-DRT-LETI/DOPT/LIR (France)
O. Gravrand, CEA-DRT-LETI/DOPT/LIR (France)
P. Castelein, CEA-DRT-LETI/DOPT/LIR (France)
J. P. Chamonal, CEA-DRT-LETI/DOPT/LIR (France)
G. Destefanis, CEA-DRT-LETI/DOPT/LIR (France)
S. Mibord, SOFRADIR (France)
P. Costa, SOFRADIR (France)

Published in SPIE Proceedings Vol. 5964:
Detectors and Associated Signal Processing II
Jean-Pierre Chatard; Peter N. J. Dennis, Editor(s)

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