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Proceedings Paper

Development and test of a profilometer based on a low-cost white-light bench microscope with a linear sensor
Author(s): Milton P. Macedo; Ana G. Fernandes; Carlos M. Correia
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Paper Abstract

Several microscope techniques namely confocal microscopy have a huge number of applications in metrology reported in literature. Although they are essentially imaging techniques metrology and particularly profilometry is a very attractive field of application owing to their ability to obtain depth discrimination. In recent years there has been a growth of three dimensional microscopy methods namely those based on structured incoherent illumination. In spite of different implementation approaches they are based on the fact that the optical transfer function (OTF) of the imaging system attenuates with defocus for every spatial frequency with the exception of zero-frequency. In this way it is able to get depth information through the projection of a grid structure so it is suitable for application in profilometry. The purpose of this work is to develop and test a profilometer based on a low-cost bench microscope. The optical layout is an epi-illuminated configuration of scanning-stage type for reflection microscopy. Tests with structured incoherent illumination in this case line-illumination are being carried out in order to achieve depth discrimination using a linear image sensor of CMOS type as detector. This paper presents a description of the optical arrangement as well as the acquisition and control system. Preliminary results are shown that were obtained using a plane mirror to measure its axial resolution and a micromachined component to test the application of this bench microscope in profilometry.

Paper Details

Date Published: 26 August 2005
PDF: 8 pages
Proc. SPIE 5858, Nano- and Micro-Metrology, 58581A (26 August 2005); doi: 10.1117/12.637258
Show Author Affiliations
Milton P. Macedo, ISEC--Instituto Superior de Engenharia de Coimbra (Portugal)
CEI--Ctr. de Electronica e Instrumentacao, Univ. Coimbra (Portugal)
Ana G. Fernandes, CEI--Ctr. de Electronica e Instrumentacao, Univ. Coimbra (Portugal)
Carlos M. Correia, CEI--Ctr. de Electronica e Instrumentacao, Univ. Coimbra (Portugal)

Published in SPIE Proceedings Vol. 5858:
Nano- and Micro-Metrology
Heidi Ottevaere; Peter DeWolf; Diederik S. Wiersma, Editor(s)

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