A novel micro-mechanical structure has been put forwarded. It is designed for high precision passive alignment and packaging of optical fibres in optoelectronics devices. The electroplated nickel micro clamp has been fabricated above the silicon V grooves. The clamps, work together with the V groove, fix the optical fibers with high precision for optical alignment when the fibers are inserted into the grooves. The fabrication of the micro clamp involves only one more photolithography and electroplating process. two single mode optical fibers have been fixed into the silicon V-groove by the nickel clamp; the measured insertion loss is lower than 0.1dB. The proposed nickel micro clamp is proved to be a low cost, high performance approach that could be widely applied in passive alignment and packaging of fiber in opto-electronics devices.

Date Published: 1 December 2005
PDF: 4 pages
Proc. SPIE 6019, Passive Components and Fiber-based Devices II, 601909 (1 December 2005); doi: 10.1117/12.637146

Published in SPIE Proceedings Vol. 6019:
Passive Components and Fiber-based Devices II
Yan Sun; Jianping Chen; Sang Bae Lee; Ian H. White, Editor(s)