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Proceedings Paper

Interferometer-less surface profilerometer
Author(s): Ponciano Rodriguez; Jose Lorenzo; Feng Jin; Sudhir Trivedi; Chen-Chia Wang; Nibir K. Dhar; Steven Fairchild
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Paper Abstract

We demonstrate experimentally an optical scanning technique for measuring the step heights of surface features without using conventional optical interferometers. This technique involves the deployment of the so-called photo-EMF sensors that are capable of sensing the presence of step-like features on an otherwise optically flat surface. Scanning of the target surface is achieved by rotating the object being investigated while keeping the laser beam stationary. Theoretical modeling and experimental data will be presented indicating the resolution of step-like features with merely 15 nm in height.

Paper Details

Date Published: 24 October 2005
PDF: 7 pages
Proc. SPIE 6017, Nanophotonics for Communication: Materials and Devices II, 60170C (24 October 2005); doi: 10.1117/12.634483
Show Author Affiliations
Ponciano Rodriguez, INAOE (Mexico)
Jose Lorenzo, Brimrose Corp. of America (United States)
Feng Jin, Brimrose Corp. of America (United States)
Sudhir Trivedi, Brimrose Corp. of America (United States)
Chen-Chia Wang, Brimrose Corp. of America (United States)
Nibir K. Dhar, Army Research Lab. (United States)
Steven Fairchild, AFRL (United States)

Published in SPIE Proceedings Vol. 6017:
Nanophotonics for Communication: Materials and Devices II
Nibir K. Dhar; Achyut K. Dutta; Kiyoshi Asakawa, Editor(s)

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