In this paper, experimental data are presented on the synthesis and properties of nanocrystalline diamond (NCD) films grown by a dc plasma CVD technique from various gas mixtures (CH₄-H₂, CH₄-H₂-Ar, CH₄-Ar, CH₄-H₂-N₂, CH₄-Ar- N₂). The interrelation between the CVD conditions, the film microstructure and film properties is established using Raman spectroscopy, XRD, XPS, AES, SEM, TEM, AFM/STM, spectroscopic ellipsometry and optical transmission spectroscopy techniques. Experimental methods for laser assisted fabrication of ultrathin and highly smooth NCD films are described. Effects of the deposition parameters (substrate temperature, CH₄ content, addition of Ar gas to CH/H₂ gas mixtures) on the grain size, surface roughness and optical properties of NCD films are discussed. Results of nitrogen doping of nanocrystalline diamond films are presented and discussed.

Date Published: 7 June 2005
PDF: 12 pages
Proc. SPIE 5850, Advanced Laser Technologies 2004, (7 June 2005);

Published in SPIE Proceedings Vol. 5850:
Advanced Laser Technologies 2004
Ivan A. Shcherbakov; Anna Giardini; Vitali I. Konov; Vladimir I. Pustovoy, Editor(s)