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Proceedings Paper

Kinoform lenses: toward nanometer resolution
Author(s): Aaron Stein; Kenneth Evans-Lutterodt; Ashley Taylor
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Paper Abstract

While hard x-rays have wavelengths in the nanometer and sub-nanometer range, the ability to focus them is limited by the quality of sources and optics, and not by the wavelength. A few options, including reflective (mirrors), diffractive (zone plates) and refractive (CRL's) are available, each with their own limitations. Here we present our work with kinoform lenses which are refractive lenses with all material causing redundant 2π phase shifts removed to reduce the absorption problems inherently limiting the resolution of refractive lenses. By stacking kinoform lenses together, the effective numerical aperture, and thus the focusing resolution, can be increased. The present status of kinoform lens fabrication and testing at Brookhaven is presented as well as future plans toward achieving nanometer resolution.

Paper Details

Date Published: 15 November 2005
PDF: 9 pages
Proc. SPIE 6002, Nanofabrication: Technologies, Devices, and Applications II, 600210 (15 November 2005); doi: 10.1117/12.631188
Show Author Affiliations
Aaron Stein, Brookhaven National Lab. (United States)
Kenneth Evans-Lutterodt, Brookhaven National Lab. (United States)
Ashley Taylor, Lucent Technologies (United States)

Published in SPIE Proceedings Vol. 6002:
Nanofabrication: Technologies, Devices, and Applications II
Warren Y.-C. Lai; Leonidas E. Ocola; Stanley Pau, Editor(s)

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