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Proceedings Paper

Uncooled microbolometer IR FPA based on sol-gel VOx
Author(s): V. N. Ovsyuk; V. V. Shashkin; M. A. Dem'yanenko; B. I. Fomin; L. L. Vasil'ieva; A. P. Soloviev
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Paper Abstract

The technology of high-quality uncooled focal plane arrays (FPA) fabrication has been developed. Simple and cheap sol-gel technology of thermosensitive vanadium oxide layers preparation is underlain in its basis. Uncooled 160x120 and 320x240 FPA for 8-14 microns spectral range have been fabricated. The noise equivalent temperature difference less than 8OmK has been achieved at frame rate 60 Hz for 160x120 FPA and at use of optics with 1/1 relative aperture.

Paper Details

Date Published: 7 June 2005
PDF: 8 pages
Proc. SPIE 5834, 18th International Conference on Photoelectronics and Night Vision Devices, (7 June 2005); doi: 10.1117/12.628663
Show Author Affiliations
V. N. Ovsyuk, Institute of Semiconductor Physics (Russia)
V. V. Shashkin, Institute of Semiconductor Physics (Russia)
M. A. Dem'yanenko, Institute of Semiconductor Physics (Russia)
B. I. Fomin, Institute of Semiconductor Physics (Russia)
L. L. Vasil'ieva, Institute of Semiconductor Physics (Russia)
A. P. Soloviev, Institute of Semiconductor Physics (Russia)

Published in SPIE Proceedings Vol. 5834:
18th International Conference on Photoelectronics and Night Vision Devices
Anatoly M. Filachov; Vladimir P. Ponomarenko; Alexander I. Dirochka, Editor(s)

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