A relatively cheap and compact deposition system, providing excellent high temperature superconducting films parameters, has been developed and studied. Y-Ba-Cu-O thin films were deposited routinely by the YAG double-laser system with the special optical beam and plasma plume shaping systems. Buffer CeO₂ layers were deposited by the laser system as well. The properties of the plasma plume generated by the laser beam with a specific intensity distribution were investigated. A correlation between the superconducting film properties and the thermal schedule of the deposition process, the geometry of the set-up, the laser beam intensity distribution, the plasma plume shape and oxygen pressure has been found. Under optimal conditions Al₂O₃ - CeO₂ - YBa₂Cu₃O_7-δ - structures have provided the maximum critical current density of close to 10⁷ A×cm^-2 at 77 K in zero magnetic field. The films were used for the ultra high-frequency filters for the telecommunication devices.

Date Published: 12 October 2005
PDF: 10 pages
Proc. SPIE 5970, Photonic Applications in Devices and Communication Systems, 597010 (12 October 2005); doi: 10.1117/12.628362

Published in SPIE Proceedings Vol. 5970:
Photonic Applications in Devices and Communication Systems
Peter Mascher; John C. Cartledge; Andrew Peter Knights; David V. Plant, Editor(s)