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Proceedings Paper

Multi-laser deposition technology for the nano-films of complex composition
Author(s): Igor Peshko; Viktor Flis; Sergey Anokhov
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Paper Abstract

A relatively cheap and compact deposition system, providing excellent high temperature superconducting films parameters, has been developed and studied. Y-Ba-Cu-O thin films were deposited routinely by the YAG double-laser system with the special optical beam and plasma plume shaping systems. Buffer CeO2 layers were deposited by the laser system as well. The properties of the plasma plume generated by the laser beam with a specific intensity distribution were investigated. A correlation between the superconducting film properties and the thermal schedule of the deposition process, the geometry of the set-up, the laser beam intensity distribution, the plasma plume shape and oxygen pressure has been found. Under optimal conditions Al2O3 - CeO2 - YBa2Cu3O7-δ - structures have provided the maximum critical current density of close to 107 A×cm-2 at 77 K in zero magnetic field. The films were used for the ultra high-frequency filters for the telecommunication devices.

Paper Details

Date Published: 12 October 2005
PDF: 10 pages
Proc. SPIE 5970, Photonic Applications in Devices and Communication Systems, 597010 (12 October 2005); doi: 10.1117/12.628362
Show Author Affiliations
Igor Peshko, Univ. of Toronto (Canada)
Viktor Flis, Institute for Metal Physics (Ukraine)
Sergey Anokhov, Institute of Applied Optics (Ukraine)

Published in SPIE Proceedings Vol. 5970:
Photonic Applications in Devices and Communication Systems
Peter Mascher; John C. Cartledge; Andrew Peter Knights; David V. Plant, Editor(s)

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