This paper presents a mathematical model to predict the dynamic behavior of a MEMS based variable optical attenuator (VOA) and compares with ANSYS simulation values. The optical attenuation is achieved by the electrostatic actuation of a metal coated cylindrical waveguide. The waveguides are suitable for micromachined configurations. Electrostatic modeling employed in this analysis also takes into consideration the cylindrical geometry of the waveguide. The modeling utilizes Rayleigh-Ritz energy method in evaluating the fundamental and the higher natural frequencies of the system. The predicted natural frequencies of the optical system have been compared with ANSYS simulations to validate the proposed model. The variation of the dynamic performance of the system with respect to the critical design parameters, such as, applied voltage, electrode gap and length of the actuator is also presented. The results clearly indicate the applicability of the proposed method to optical attenuation.

Date Published: 12 October 2005
PDF: 8 pages
Proc. SPIE 5970, Photonic Applications in Devices and Communication Systems, 59700U (12 October 2005); doi: 10.1117/12.628271

Published in SPIE Proceedings Vol. 5970:
Photonic Applications in Devices and Communication Systems
Peter Mascher; John C. Cartledge; Andrew Peter Knights; David V. Plant, Editor(s)