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Proceedings Paper

Light scattering techniques for measurement of precision laser optical surfaces and highly reflective mirrors
Author(s): Valentina Azarova; Yuriy Golyaev; Georgy Kolodnyy
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Paper Abstract

Light angle-resolved and total integral scattering (ARS and TIS) have been used for several decades to probe surface roughness and heterogeneities in optical multilayers and substrates. We present a summary of results reached in laser metrology techniques in our Institute. Elaboration of the optical surface finish technology requires non-destructive sensitive measurement methods subsequent development. Need optical surfaces for precision quantum electronics devices are usually composed of irregularities smaller than 1 nm "high" with "slope" of low gradient of perhaps 0,001 rad relative to the mean surface and destructive layer thickness about tens of nanometres. There are described application of ARS method and automatically device, based on this method for testing optically transparent surfaces by scattering indicatrix analysing. We discuss the problem: how it can measure surfaces roughness of inside scattering materials substrates and separate of surface roughness and substrates material heterogeneity effects. We touched up the questions: how surface rms-roughness of substrates correlates with scattering of mirrors and how smooth surfaces of substrates correlate with back specula scattering of ion-sputtering on these substrates mirrors. In some cases of our researches we compared the light scattering measurement results with the results of atomic force microscope (AFM) and X-rays scattering (XRS) measurement methods.

Paper Details

Date Published: 20 October 2005
PDF: 11 pages
Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 596522 (20 October 2005); doi: 10.1117/12.625656
Show Author Affiliations
Valentina Azarova, POLYUS Research and Development Institute (Russia)
Yuriy Golyaev, POLYUS Research and Development Institute (Russia)
Georgy Kolodnyy, POLYUS Research and Development Institute (Russia)

Published in SPIE Proceedings Vol. 5965:
Optical Fabrication, Testing, and Metrology II
Angela Duparré; Roland Geyl; Lingli Wang, Editor(s)

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