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Proceedings Paper

Angle resolved scatter measurements on optical components
Author(s): P. Kadkhoda; H. Mädebach; D. Ristau
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Paper Abstract

For precise angle resolved scatter (ARS) investigations on optical components, a scatterometer has been developed, which allows three dimensional scanning of the scattered radiation from the test specimen. By combining the set-up with different radiation sources, measurements in the spectral region from the DUV- to the NIR-spectral range can be performed. The optical properties of the components: reflection, transmittance, and the scatter behavior can be determined in the same run. The measured data are absolutely calibrated to the incident power. In this paper, we report about ARS- measurements on different samples such as holographic gratings, bare and anti reflective coated substrates. Additionally, results of scatter measurements on high reflective mirrors for 633nm with different numbers of layers will be presented. The comparison of the ARS-data and the results of Total Scattering (according to ISO 13696) on the same samples will be discussed.

Paper Details

Date Published: 19 October 2005
PDF: 9 pages
Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 59651A (19 October 2005); doi: 10.1117/12.625398
Show Author Affiliations
P. Kadkhoda, Laser Zentrum Hannover e.V. (Germany)
H. Mädebach, Laser Zentrum Hannover e.V. (Germany)
D. Ristau, Laser Zentrum Hannover e.V. (Germany)

Published in SPIE Proceedings Vol. 5965:
Optical Fabrication, Testing, and Metrology II
Angela Duparré; Roland Geyl; Lingli Wang, Editor(s)

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