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Proceedings Paper

Characterization of complex optical systems based on wavefront retrieval from point spread function
Author(s): B. Boehme; H. Gross
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Paper Abstract

The measurement of aberrations is essential to qualify and improve optical system performance. Interferometry and Shack-Hartmann test are well known methods, which usually characterize only a component of the system. In addition the field dependence of aberrations is difficult to determine with these methods. We evaluated the iterative approach based on Gerchberg Saxton Algorithm and optimized its accuracy for experimental data. The aberrations are determined from image stacks formed by a point source with varying focus position. In addition to calculating the aberrations also apodisation can be taken into account. The numerical accuracy of the technique is up to 1/100 of a wavelength (Fringe Zernike coefficients) for ideal noiseless detection. For experimental data the main uncertainty is caused by model assumptions as the precise numerical aperture, deconvolution for finite pinhole sizes, magnification or step size in defocus as well as accuracy of equipment. The dismatch between retrieval and direct wavefront measurement is less than 1/20 of a wavelength. Additionally the influence of different components of the optical system may be separated by measurements with exchanged components. The adjustment of an objective lens was tracked with respect to the movement of the lens elements.

Paper Details

Date Published: 19 October 2005
PDF: 12 pages
Proc. SPIE 5965, Optical Fabrication, Testing, and Metrology II, 596515 (19 October 2005); doi: 10.1117/12.625295
Show Author Affiliations
B. Boehme, Carl Zeiss Jena GmbH (Germany)
H. Gross, Carl Zeiss AG (Germany)

Published in SPIE Proceedings Vol. 5965:
Optical Fabrication, Testing, and Metrology II
Angela Duparré; Roland Geyl; Lingli Wang, Editor(s)

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