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Proceedings Paper

Integrated optics and MEMS in microsensing
Author(s): Christophe Gorecki
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Paper Abstract

Silicon micromachining benefits from the small scale and the facility of integration with electronic circuits and sensors resulting in production of miniaturized and smart microsystems with moving parts. The dimensional scale of MEMS/MOEMS devices is immediately compatible with the size of Integrated Optics, and is appropriate to control or manipulate optical radiations. This technology is suitable to fabricate precision-defined optical components and offers easy alignment procedures of optical parts. This paper examines the contribution of micromachined structures in the specific context of optical microsensors.

Paper Details

Date Published: 30 September 2005
PDF: 5 pages
Proc. SPIE 5956, Integrated Optics: Theory and Applications, 59560E (30 September 2005);
Show Author Affiliations
Christophe Gorecki, FEMTO-ST (France)

Published in SPIE Proceedings Vol. 5956:
Integrated Optics: Theory and Applications
Tadeusz Pustelny; Paul V. Lambeck; Christophe Gorecki, Editor(s)

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