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Proceedings Paper

Laser ablation and laser direct writing as enabling technologies for the definition of micro-optical elements
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Paper Abstract

A qualitative comparison is made between laser direct writing and laser ablation as enabling technologies for the structuring of multimode waveguides (50x50μm2) and 45° micro-mirrors into an optical layer. A small demonstrator is fabricated that allows us to couple light vertically from a transmitter into an optical layer and from the optical layer to a receiver. The optical layer, a multifunctional acrylate-based photo-polymer, is applied on an FR4-substrate. Multimode waveguides, that carry signals in the plane of the optical layer, are fabricated by means of laser direct writing, a technology that is available at HWU. The 45° micro-mirrors, that provide out-of-plane coupling, are ablated with the laser ablation set-up available at UGent. This set-up contains a KrF-excimer laser (248nm) that can be tilted, which eases the definition of angled facets. Surface roughness measurements are performed on both the optical layer and the micro-mirrors with a non-contact optical profiler. Loss measurements are performed on both the waveguides and the micro-mirrors.

Paper Details

Date Published: 30 September 2005
PDF: 10 pages
Proc. SPIE 5956, Integrated Optics: Theory and Applications, 59561B (30 September 2005); doi: 10.1117/12.622904
Show Author Affiliations
Nina Hendrickx, Ghent Univ. (Belgium)
Himanshu Suyal, Heriot-Watt Univ. (United Kingdom)
Geert Van Steenberge, Ghent Univ. (Belgium)
Aongus McCarthy, Heriot-Watt Univ. (United Kingdom)
Andy Walker, Heriot-Watt Univ. (United Kingdom)
Heidi Ottevaere, Vrije Univ. Brussel (Belgium)
Hugo Thienpont, Vrije Univ. Brussel (Belgium)
Mohammad Taghizadeh, Heriot-Watt Univ. (United Kingdom)
Peter Van Daele, Ghent Univ. (Belgium)

Published in SPIE Proceedings Vol. 5956:
Integrated Optics: Theory and Applications
Tadeusz Pustelny; Paul V. Lambeck; Christophe Gorecki, Editor(s)

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