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Proceedings Paper

Template based nanofabrication: mechanical characterization of film-substrate interface
Author(s): Biswajit Das; Pavan Singaraju
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Paper Abstract

This paper presents the results of investigations of thin film alumina templates fabricated on silicon and other substrates. Such templates are of significant interest for the low-cost implementation of semiconductor and metal nanostructure arrays. In addition, thin film alumina templates on silicon have the potential for nanostructure integration with silicon electronics. Formation of thin film alumina templates on silicon substrates was investigated under different fabrication conditions, and the dependence of pore morphology and pore formation rate on process parameters was evaluated. In addition, process conditions for improved pore size distribution and periodicity were determined. The template/silicon interface, important for nanostructure integration on silicon, was investigated using different techniques. Thin film alumina templates on non-silicon substrates such as glass, indium-tin-oxide-coated glass and silicon carbide were also investigated.

Paper Details

Date Published: 12 April 2005
PDF: 9 pages
Proc. SPIE 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, (12 April 2005); doi: 10.1117/12.621976
Show Author Affiliations
Biswajit Das, Univ. of Nevada/Las Vegas (United States)
Pavan Singaraju, Univ. of Nevada/Las Vegas (United States)


Published in SPIE Proceedings Vol. 5852:
Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics
Chenggen Quan; Fook Siong Chau; Anand Asundi; Brian Stephen Wong; Chwee Teck Lim, Editor(s)

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