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Proceedings Paper

Testing system for extreme ultraviolet detectors
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Paper Abstract

The paper presents analyses of a testing system of extreme ultraviolet detectors. The testing procedure concerns determination of a quantum efficiency of photodiode detectors. The testing method is based on a comparison of the detected signals from the model detector and the tested one The system consists of a gas-puff laser plasma source, a metrology chamber with an optical system, and a model energy detector. Theoretical and experimental investigations, including optimisation of efficiency and stability of the radiation source, calculation of a charge measurement accuracy of the model detector, determination of mirrors reflectivity and its angle dependence are discussed.

Paper Details

Date Published: 7 October 2005
PDF: 9 pages
Proc. SPIE 5948, Photonics Applications in Industry and Research IV, 594822 (7 October 2005); doi: 10.1117/12.621814
Show Author Affiliations
Janusz Mikołajczyk, Institute of Optoelectronics MUT (Poland)
Zbigniew Bielecki, Institute of Optoelectronics MUT (Poland)
Jacek Wojtas, Institute of Optoelectronics MUT (Poland)

Published in SPIE Proceedings Vol. 5948:
Photonics Applications in Industry and Research IV
Ryszard S. Romaniuk; Stefan Simrock; Vladimir M. Lutkovski, Editor(s)

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