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Proceedings Paper

Modern approaches in phase measuring metrology
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Paper Abstract

The measurement accuracy of an interferometric optical test is generally limited by the environment. This paper discusses two single-shot interferometric techniques for reducing the sensitivity of an optical test to vibration; simultaneous phase-shifting interferometry and a special form of spatial carrier interferometry utilizing a micropolarizer phase-shifting array. In both techniques averaging can be used to reduce the effects of turbulence and the normal double frequency errors generally associated with phase-shifting interferometry.

Paper Details

Date Published: 13 June 2005
PDF: 9 pages
Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); doi: 10.1117/12.621581
Show Author Affiliations
James Millerd, 4D Technology Corp. (United States)
Neal Brock, 4D Technology Corp. (United States)
John Hayes, 4D Technology Corp. (United States)
Brad Kimbrough, 4D Technology Corp. (United States)
Matt Novak, 4D Technology Corp. (United States)
Michael North-Morris, 4D Technology Corp. (United States)
James C. Wyant, Optical Sciences Ctr./Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 5856:
Optical Measurement Systems for Industrial Inspection IV
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)

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