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Proceedings Paper

Reactive magnetron sputtering of antinomy tin oxide films on glass substrate
Author(s): Chien-Cheng Liu; Wei-Chi Huang; Fei-Lung Lu; Chien-Tang Wang
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Paper Abstract

Antinomy tin oxide (ATO) films have been widely used as a transparent conducting thin film material for application in various fields such as solar cells, opto-electronic devices, and liquid crystal displays. It has a high carrier concentration, low electrical resistivity and high transmission in the visible light range. ATO films were deposited on corning glass 1737F by low temperature reactive magnetron sputtering. The structural and surface properties of the films were determined with scanning electron microscopy, transmission electron microscopy, X-ray diffraction and atomic force microscopy. The effects of annealing temperature and atmosphere on the composition, microstructure, surface morphology, conductivity and optical properties of ATO films were investigated.

Paper Details

Date Published: 12 April 2005
PDF: 6 pages
Proc. SPIE 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, (12 April 2005); doi: 10.1117/12.621512
Show Author Affiliations
Chien-Cheng Liu, Kun Shan Univ. of Technology (Taiwan)
Wei-Chi Huang, Kun Shan Univ. of Technology (Taiwan)
Fei-Lung Lu, Kun Shan Univ. of Technology (Taiwan)
Chien-Tang Wang, Kun Shan Univ. of Technology (Taiwan)


Published in SPIE Proceedings Vol. 5852:
Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics
Chenggen Quan; Fook Siong Chau; Anand Asundi; Brian Stephen Wong; Chwee Teck Lim, Editor(s)

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