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Proceedings Paper

MEMS tip/tilt and piston mirror arrays as diffractive optical elements
Author(s): Roland Ryf; Howard R. Stuart; C. Randy Giles
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Paper Abstract

We present an analytic evaluation of the optical performance of a tip/tilt and piston Spatial Light Modulator, for use in adaptive optic and beam steering applications. The impact of array fill factor, pixel curvature, position and tilt accuracy, and pixel yield are discussed in detail. Two arrangements for beam steering are presented and analyzed; in the first the SLM is used as a programmable higher-order diffraction grating, and in the second the SLM acts as a programmable Fresnel lens inside a telescope.

Paper Details

Date Published: 30 August 2005
PDF: 11 pages
Proc. SPIE 5894, Advanced Wavefront Control: Methods, Devices, and Applications III, 58940C (30 August 2005);
Show Author Affiliations
Roland Ryf, Bell Labs., Lucent Technologies (United States)
Howard R. Stuart, Bell Labs., Lucent Technologies (United States)
C. Randy Giles, Bell Labs., Lucent Technologies (United States)


Published in SPIE Proceedings Vol. 5894:
Advanced Wavefront Control: Methods, Devices, and Applications III
Mark T. Gruneisen; John D. Gonglewski; Michael K. Giles, Editor(s)

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