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Proceedings Paper

A novel method for fabrication of continuous relief optical element
Author(s): Xiaowei Guo; Jinglei Du; Mingyong Chen; Yanqin Ma; Jianhua Zhu; Qinjun Peng; Yongkang Guo; Chunlei Du
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Paper Abstract

A novel method for the fabrication of continuous micro-optical components is presented in this paper. It employs a computer controlled spatial-light-modulator (SLM) as a switchable projection mask and silver-halide sensitized gelatin (SHSG) as recording material. By etching SHSG with enzyme solution, the micro-optical components with relief modulation can be generated through special processing procedures. The principles of digital SLM-based lithography and enzyme etching SHSG are discussed in detail, and microlens arrays, micro axicon-lens arrays and gratings with good profile were achieved. This method is simple, cheap and the aberration in processing procedures can be in-situ corrected in the step of designing mask, so it is a practical method to fabricate continuous profile for low-volume production.

Paper Details

Date Published: 26 August 2005
PDF: 9 pages
Proc. SPIE 5874, Current Developments in Lens Design and Optical Engineering VI, 58740S (26 August 2005); doi: 10.1117/12.619598
Show Author Affiliations
Xiaowei Guo, Sichuan Univ. (China)
Jinglei Du, Sichuan Univ. (China)
Mingyong Chen, Sichuan Univ. (China)
Yanqin Ma, Sichuan Univ. (China)
Jianhua Zhu, Sichuan Univ. (China)
Qinjun Peng, Sichuan Univ. (China)
Yongkang Guo, Sichuan Univ. (China)
Chunlei Du, Institute of Optics and Electronics, CAS (China)

Published in SPIE Proceedings Vol. 5874:
Current Developments in Lens Design and Optical Engineering VI
Pantazis Z. Mouroulis; Warren J. Smith; R. Barry Johnson, Editor(s)

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