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Proceedings Paper

Experiences from FTF NanoScience Lab at the University of Lund: use of a 2-stage isolation system with very low natural frequency
Author(s): Claes R. Fredö; Jonas Brunskog
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Paper Abstract

A new clean room facility is in progress at the Division of Solid State Physics / Nanometer Consortium (FTF) at Lund University. On site measurement from road excitation at a speed bump located at a distance of 25 m from the site and from main roads situated at a few hundred meters distance revealed high vibration levels. A complicating matter was found in high lateral vibration levels at the 4 Hz range. Various set ups using piling and dig out were investigated and found not to improve the situation. A vibration isolation system with very low natural frequency was found to be the only way left to use the site. A modular set up has been used such that the system can be either 1-stage isolated or 2-stage isolated.

Paper Details

Date Published: 18 August 2005
PDF: 12 pages
Proc. SPIE 5933, Buildings for Nanoscale Research and Beyond, 59330I (18 August 2005); doi: 10.1117/12.618950
Show Author Affiliations
Claes R. Fredö, Ingemansson Technology AB (Sweden)
Jonas Brunskog, Ingemansson Technology AB (Sweden)
Lund Univ. (Sweden)

Published in SPIE Proceedings Vol. 5933:
Buildings for Nanoscale Research and Beyond
Hal Amick, Editor(s)

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