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Proceedings Paper

Multi-purpose extrinsic Fabry-Perot sensor with miniature dual fiber configuration
Author(s): Jung-Tsung Chou; Chiung-Huei Huang; Ching-Ming Yeh; Calvin C. Chang; Hung-Ming Tai
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Paper Abstract

A miniature sensor based on extrinsic Fabry-Perot interferometry is proposed. In this setup, two optical fibers are integrated into a miniature sensing head to produce a pair of quadrature signals for solving direction ambiguity problem. It can also achieve nanometer resolution and at least 10kHz dynamic range after electronic subdivision. Comparing with capacitive senor, it has advantages including electromagnetic interference immunity and long distance measurement capability. In this paper, related theoretical descriptions are introduced and the comparisons with capacitive sensor are conducted. An experiment for detecting the characteristics of hard disk drive with this novel sensor is depicted. Furthermore, a new method of measuring liquid refractive index is described. All the experiment results show that this novel sensor is excellent in displacement and vibration measurement and many other applications.

Paper Details

Date Published: 18 August 2005
PDF: 10 pages
Proc. SPIE 5879, Recent Developments in Traceable Dimensional Measurements III, 58790K (18 August 2005); doi: 10.1117/12.617991
Show Author Affiliations
Jung-Tsung Chou, Industrial Technology Research Institute (Taiwan)
Chiung-Huei Huang, Industrial Technology Research Institute (Taiwan)
Ching-Ming Yeh, Industrial Technology Research Institute (Taiwan)
Calvin C. Chang, Industrial Technology Research Institute (Taiwan)
Hung-Ming Tai, Industrial Technology Research Institute (Taiwan)


Published in SPIE Proceedings Vol. 5879:
Recent Developments in Traceable Dimensional Measurements III
Jennifer E. Decker; Gwo-Sheng Peng, Editor(s)

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