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Proceedings Paper

A DSP-based controller for a linear actuator system with sub-angstrom resolution and 15 millimeter travel range
Author(s): Alex Smolyanitskiy; Deming Shu; Thomas Wong
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Paper Abstract

We have designed and tested a new digital signal processor (DSP)-based closed-loop feedback controller for a linear actuator system with sub-angstrom resolution and 15-mm travel range. The linear actuator system consists of a laser Doppler encoder with multiple-reflection optics [1], a high-stiffness weak-link mechanism with high driving sensitivity and stability [2], and a Texas Instruments TMS320C40 DSP-based controller for high-performance closed-loop feedback control. In this paper, we discuss the DSP-based controller design, as well as recent test results yielding step sizes below 50 picometers obtained with the atomic force microprobe setup.

Paper Details

Date Published: 18 August 2005
PDF: 11 pages
Proc. SPIE 5877, Optomechanics 2005, 58770G (18 August 2005); doi: 10.1117/12.617855
Show Author Affiliations
Alex Smolyanitskiy, Argonne National Lab. (United States)
Illinois Institute of Technology (United States)
Deming Shu, Argonne National Lab. (United States)
Thomas Wong, Illinois Institute of Technology (United States)

Published in SPIE Proceedings Vol. 5877:
Optomechanics 2005
Alson E. Hatheway, Editor(s)

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