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Proceedings Paper

An extension method of metal layer layout in mask data preparation for robust processes
Author(s): Kensuke Tsuchiya; Kazuhisa Ogawa; Satomi Nakamura; Kazuyoshi Kawahara; Hidetoshi Oishi; Hidetoshi Ohnuma
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Paper Abstract

Application of DFM (Design for Manufacturability) techniques to the design of random logic metal-layers with million nodes is indispensable for manufacturing semiconductor devices with the node of 90 nm and the bellow. Critical dimension lines corresponding to minimum design rules do not have sufficient process margin due to the presence of focus variation of ArF scanner. This often induces resist-line narrowing, which causes circuit-speed degradations and Cu opens, finally leading to serious yield losses. There are numerous studies on techniques to expand the process margin, such as the placement of dummy and assist patterns. However such techniques can not sometimes be applied due to restrictions of design rule. We note that the presence of such augmented patterns increases the wire capacitance and mask TAT (turn around time). We have developed an automatic layout-pattern generation method which extends the line-end of patterns adjacent to isolated patterns. This resulted in a significant improvement of the process margin of isolated patterns.

Paper Details

Date Published: 28 June 2005
PDF: 9 pages
Proc. SPIE 5853, Photomask and Next-Generation Lithography Mask Technology XII, (28 June 2005); doi: 10.1117/12.617135
Show Author Affiliations
Kensuke Tsuchiya, Sony Corp. (Japan)
Kazuhisa Ogawa, Sony Corp. (Japan)
Satomi Nakamura, Sony Corp. (Japan)
Kazuyoshi Kawahara, Sony Corp. (Japan)
Hidetoshi Oishi, Sony Corp. (Japan)
Hidetoshi Ohnuma, Sony Corp. (Japan)

Published in SPIE Proceedings Vol. 5853:
Photomask and Next-Generation Lithography Mask Technology XII
Masanori Komuro, Editor(s)

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