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Proceedings Paper

High performance Fizeau and scanning white-light interferometers for mid-spatial frequency optical testing of free-form optics
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Paper Abstract

Two specially-designed visible-wavelength interferometers meet demanding performance requirements in the mid-spatial frequency regime for current and next generation free-form x-ray and EUV optics. A Fizeau phase shifting interferometer measures waviness in the spatial frequency range from 0.5 to 10 mm-1 and an interferometric microscope measures finer-scale deviations from 1 to 1000 mm-1. Uncertainty analysis and experimental work demonstrate <1-nm system error after calibration and 0.05-nm repeatability for both instruments working in a clean-room environment.

Paper Details

Date Published: 31 August 2005
PDF: 8 pages
Proc. SPIE 5921, Advances in Metrology for X-Ray and EUV Optics, 59210A (31 August 2005); doi: 10.1117/12.616874
Show Author Affiliations
Leslie L. Deck, Zygo Corp. (United States)
Chris Evans, Zygo Corp. (United States)

Published in SPIE Proceedings Vol. 5921:
Advances in Metrology for X-Ray and EUV Optics
Lahsen Assoufid; Peter Z. Takacs; John S. Taylor, Editor(s)

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