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Multifunctional interferometric platform for static and dynamic MEMS measurement
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Paper Abstract

Increasing technological capabilities to produce microelements (for example: microbeams, micromembranes and micromirrors) and their expanding areas of application introduce unprecedented requirements concerning their design and testing. Conventional two beam interferometry is one of the most popular testing methods of microelements that have reflecting surface. However the elements under test may bring additional challenges: their surface finish may be mixed i.e. reflective-diffusive which restrict their analysis by conventional interferometry; their surfaces may have complicated shape or large shape gradients which restrict their testing by means of interferometer with flat reference mirror. In this paper we propose to solve these problems by converting conventional Twyman-Green interferometer into multifunctional measurement platform by introducing different reference surfaces including: mirror (for conventional two beam interferometer); diffuser (for ESPI); Liquid Crystal On Silicon (LCOS) phase spatial light modulator (for active interferometer). Diffuser allows to implement ESPI in the same system configuration. Special software enables to combine the results of measurement by conventional interferometry (mirror-like surface) and ESPI (diffuse surface). LCOS serves as an adaptive reference mirror and phase shifter. The use of such element allows to increase measurement range of the interferometer and simplifies out-of-plane displacement measurement through object wavefront compensation. The applicability of the platform will be shown at the examples of active micromembranes testing in static and dynamic modes of their work.

Paper Details

Date Published: 31 August 2005
PDF: 10 pages
Proc. SPIE 5878, Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II, 587807 (31 August 2005); doi: 10.1117/12.616840
Show Author Affiliations
Jacek Kacperski, Warsaw Univ. of Technology (Poland)
Malgorzata Kujawinska, Warsaw Univ. of Technology (Poland)

Published in SPIE Proceedings Vol. 5878:
Advanced Characterization Techniques for Optics, Semiconductors, and Nanotechnologies II
Angela Duparre; Bhanwar Singh; Zu-Han Gu, Editor(s)

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