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Proceedings Paper

Monolithic low sideband guided-mode resonance filter based on two-layer structure
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Paper Abstract

In this paper, fabrication an optical filter based on guided-mode resonance (GMR) effect in a silicon nitride (SiNx) membrane by silicon bulk micromachining technologies is demonstrated. Such a filter has advantages of simple structure, high efficiency and it is potential to be integrated with other developed optoelectronic elements into an integrated micro systems. The design consideration, fabrication procedures and measured spectral response are shown in this paper.

Paper Details

Date Published: 27 August 2005
PDF: 8 pages
Proc. SPIE 5931, Nanoengineering: Fabrication, Properties, Optics, and Devices II, 593116 (27 August 2005); doi: 10.1117/12.616749
Show Author Affiliations
Che-Lung Hsu, National Central University (Taiwan)
Yu-Hong Chou, National Central University (Taiwan)
Chih-Ming Wang, National Central University (Taiwan)
Jenq-Yang Chang, National Central University (Taiwan)
Chien-Chieh Lee, National Central University (Taiwan)

Published in SPIE Proceedings Vol. 5931:
Nanoengineering: Fabrication, Properties, Optics, and Devices II
Elizabeth A. Dobisz; Louay A. Eldada, Editor(s)

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