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Proceedings Paper

Characteristics of SiC/Mg multilayer mirrors
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Paper Abstract

A multilayer coating mirror of Mo/Si is usually integrated into an EUV optics for space science, especially for He-II (30.4 nm) radiation, because it is highly stable under vacuum and atmosphere and achieves the fairly high reflectance of 15-20%. But space science community needs the coating of higher reflectance at 30.4 nm radiation for the future satellite missions. In this work, to develop a new multilayer mirror of He-II radiation, we report the design of a multilayer consisting of a pair of Mg and SiC, and its production, and aging change of the reflectance under the atmosphere and vacuum circumstance.

Paper Details

Date Published: 6 October 2005
PDF: 8 pages
Proc. SPIE 5900, Optics for EUV, X-Ray, and Gamma-Ray Astronomy II, 59001A (6 October 2005);
Show Author Affiliations
Tetsunori Murachi, The Univ. of Tokyo (Japan)
Ichiro Yoshikawa D.D.S., The Univ. of Tokyo (Japan)
Hisataka Takenaka, NTT Advanced Technology Corp. (Japan)
Satoshi Ichimaru, NTT Advanced Technology Corp. (Japan)

Published in SPIE Proceedings Vol. 5900:
Optics for EUV, X-Ray, and Gamma-Ray Astronomy II
Oberto Citterio; Stephen L. O'Dell, Editor(s)

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