Share Email Print

Proceedings Paper

Nanometer-scale imaging with compact soft x-ray lasers
Author(s): Fernando Brizuela; Georgiy Vaschenko; Courtney Brewer; Michael Grisham; Carmen S. Menoni; Hector Mancini; Mario C. Marconi; Jorge J. Rocca; Weilun Chao; J. Alexander Liddle; Erik H. Anderson; David T. Attwood; Alexander V. Vinogradov; Igor A. Artioukov; Yuriy P. Pershyn; Valeriy V. Kondratenko
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

We have demonstrated imaging at soft x-ray wavelengths in transmission and reflection modes using high repetition rate table-top soft x-ray lasers. Transmission mode imaging with a resolution better than 50 nm was demonstrated using the output from a 13.9 nm Ni-like Ag laser in combination with condenser and objective Fresnel zone plate optics. Reflection mode imaging of a microelectronic chip with a resolution of 120-150 nm was demonstrated using the illumination provided by the 46.9 nm output from a compact capillary-discharge Ne-like Ar laser. This microscope combines a Schwarzschild condenser and a zone plate objective. The results demonstrate the feasibility of practical nanometer-scale microscopy with compact soft-x-ray laser sources.

Paper Details

Date Published: 13 September 2005
PDF: 7 pages
Proc. SPIE 5919, Soft X-Ray Lasers and Applications VI, 59190N (13 September 2005); doi: 10.1117/12.614646
Show Author Affiliations
Fernando Brizuela, Colorado State Univ. (United States)
Georgiy Vaschenko, Colorado State Univ. (United States)
Courtney Brewer, Colorado State Univ. (United States)
Michael Grisham, Colorado State Univ. (United States)
Carmen S. Menoni, Colorado State Univ. (United States)
Hector Mancini, Colorado State Univ. (United States)
Mario C. Marconi, Colorado State Univ. (United States)
Jorge J. Rocca, Colorado State Univ. (United States)
Weilun Chao, Lawrence Berkeley National Lab. (United States)
J. Alexander Liddle, Lawrence Berkeley National Lab. (United States)
Erik H. Anderson, Lawrence Berkeley National Lab. (United States)
David T. Attwood, Lawrence Berkeley National Lab. (United States)
Alexander V. Vinogradov, P.N. Lebedev Physical Institute (Russia)
Igor A. Artioukov, P.N. Lebedev Physical Institute (Russia)
Yuriy P. Pershyn, National Technical Univ. KhPI (Ukraine)
Valeriy V. Kondratenko, National Technical Univ. KhPI (Ukraine)

Published in SPIE Proceedings Vol. 5919:
Soft X-Ray Lasers and Applications VI
Ernst E. Fill, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?