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Proceedings Paper

A focus sensor for an application in a nanopositioning and nanomeasuring machine
Author(s): Rostyslav Mastylo; Denis Dontsov; Eberhard Manske; Gerd Jager
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Paper Abstract

A focus sensor on the basis of a hologram laser unit was developed and successfully tested in a nanopositioning and nanomeasuring machine as a zero indicator. The high resolution of the focus sensor is due to a high-precision optical adjustment and special solutions incorporated into the electronic parts. Thus, any sensor malfunctions caused by back-reflected light inside of the assembly could be completely avoided by means of the special high-frequency modulation and laser power stabilization. Common mode noise reduction provides the high SNR of the output signals. The measurements were made according to a dynamic principle by permanent difference formation between the output signal of the focus sensor and the length value of the z-interferometer of the nanopositioning and nanomeasuring machine. The measuring results are presented, and further possibilities of application are outlined.

Paper Details

Date Published: 13 June 2005
PDF: 7 pages
Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); doi: 10.1117/12.612887
Show Author Affiliations
Rostyslav Mastylo, Technische Univ. Ilmenau (Germany)
Denis Dontsov, SIOS Messtechnik GmbH (Germany)
Eberhard Manske, Technische Univ. Ilmenau (Germany)
Gerd Jager, Technische Univ. Ilmenau (Germany)

Published in SPIE Proceedings Vol. 5856:
Optical Measurement Systems for Industrial Inspection IV
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)

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