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Proceedings Paper

Confocal micro-optical distance sensor: principle and design
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Paper Abstract

Increasing demands for the monitoring of tolerances of small mechanical and optical precision components require improved measurement techniques. In this paper the basic concept and different optical designs of a confocal microoptical distance-sensor are presented. The sensors use the chromatic-confocal measurement principle which does not require a mechanical depth scan. Therefore, a chromatic-confocal point sensor can be designed without any moving parts. This fact is used to design a miniaturized sensor head with an outer diameter smaller than two millimetres. A special feature of the sensor head is its capability to measure sideways. This enables e.g. to measure surfaces in small drilling holes.

Paper Details

Date Published: 13 June 2005
PDF: 8 pages
Proc. SPIE 5856, Optical Measurement Systems for Industrial Inspection IV, (13 June 2005); doi: 10.1117/12.612008
Show Author Affiliations
Aiko K. Ruprecht, Univ. Stuttgart (Germany)
Christof Pruss, Univ. Stuttgart (Germany)
Hans J. Tiziani, Univ. Stuttgart (Germany)
Wolfgang Osten, Univ. Stuttgart (Germany)
Peter Lucke, Forschungszentrum Karlsruhe (Germany)
Arndt Last, Forschungszentrum Karlsruhe (Germany)
Jurgen Mohr, Forschungszentrum Karlsruhe (Germany)
Peter Lehmann, Mahr GmbH Gottingen (Germany)

Published in SPIE Proceedings Vol. 5856:
Optical Measurement Systems for Industrial Inspection IV
Wolfgang Osten; Christophe Gorecki; Erik L. Novak, Editor(s)

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