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Proceedings Paper

Sub-0.1µm optical track width measurement
Author(s): Richard J. Smith; Chung W. See; Mike G. Somekh; Andrew Yacoot
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Paper Abstract

In this paper, we will describe a technique that combines a common path scanning optical interferometer with artificial neural networks (ANN), to perform track width measurements that are significantly beyond the capability of conventional optical systems. Artificial neural networks have been used for many different applications. In the present case, ANNs are trained using profiles of known samples obtained from the scanning interferometer. They are then applied to tracks that have not previously been exposed to the networks. This paper will discuss the impacts of various ANN configurations, and the processing of the input signal on the training of the network. The profiles of the samples, which are used as the inputs to the ANNs, are obtained with a common path scanning optical interferometer. It provides extremely repeatable measurements, with very high signal to noise ratio, both are essential for the working of the ANNs. The characteristics of the system will be described. A number of samples with line widths ranging from 60nm-3μm have been measured to test the system. The system can measure line widths down to 60nm with a standard deviation of 3nm using optical wavelength of 633nm and a system numerical aperture of 0.3. These results will be presented in detail along with a discussion of the potential of this technique.

Paper Details

Date Published: 29 August 2005
PDF: 8 pages
Proc. SPIE 5858, Nano- and Micro-Metrology, 58580M (29 August 2005); doi: 10.1117/12.611999
Show Author Affiliations
Richard J. Smith, Univ. of Nottingham (United Kingdom)
Chung W. See, Univ. of Nottingham (United Kingdom)
Mike G. Somekh, Univ. of Nottingham (United Kingdom)
Andrew Yacoot, National Physical Lab. (United Kingdom)

Published in SPIE Proceedings Vol. 5858:
Nano- and Micro-Metrology
Heidi Ottevaere; Peter DeWolf; Diederik S. Wiersma, Editor(s)

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