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Proceedings Paper

Integration of probe systems in a nanopositioning and nanomeasuring machine
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Paper Abstract

The paper describes the design of a high-precision three-dimensional nanopositioning and nanomeasuring machine (NPM-Machine). The NPM-Machine has been developed by the Institute of Process Measurement and Sensor Technology of the Technische Universität Ilmenau and manufactured by the SIOS Meßtechnik GmbH Ilmenau. The machine was successfully tested and continually improved in the last few years. The NPM-Machine has a resolution of less than 0,1 nm over the entire positioning and measuring range of 25 mm x 25 mm x 5 mm. An Abbe offset-free design and the application of a new concept for compensating systematic errors resulting from mechanical bearings provide extraordinary accuracy. An important part of the NPM-Machine is constituted by a mirror corner. The integration of several probe systems and Nanotools makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and wafer inspection, nanostructuring, biotechnology as well as measuring mechanical precision workpieces a.s.o. Various probe systems have been integrated into the NPM-Machines. The machines are operating successfully in several German and foreign institutes including the Physikalisch-Technische Bundesanstalt (PTB). The article gives basic information on the NPM-Machine and describes the mode of operation and the measurements by means of probe systems.

Paper Details

Date Published: 14 February 2005
PDF: 5 pages
Proc. SPIE 5776, Eighth International Symposium on Laser Metrology, (14 February 2005); doi: 10.1117/12.611848
Show Author Affiliations
Gerd Jaeger, Technische Univ. Ilmenau (Germany)
Eberhard Manske, Technische Univ. Ilmenau (Germany)
Tino Hausotte, Technische Univ. Ilmenau (Germany)
Rostyslav Mastylo, Technische Univ. Ilmenau (Germany)
Hans-Joachim Buechner, Technische Univ. Ilmenau (Germany)
Rainer Gruenwald, Technische Univ. Ilmenau (Germany)
Roland Fussl, Technische Univ. Ilmenau (Germany)

Published in SPIE Proceedings Vol. 5776:
Eighth International Symposium on Laser Metrology
R. Rodriguez-Vera; F. Mendoza-Santoyo, Editor(s)

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